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Cleanroom Facilities

Working in a cleanroom

FIRST-Lab provides with its cleanroom about 400 square meters of processing environment with controlled parameters for micro- and nanoscience experiments. Young scientists have the opportunity to work in the field of photo- and nanolithography, to carry out thin film deposition processes, to analyze and characterize their processed samples and to learn about epitaxy of semiconductors. Read more

FIRST-Lab Introduction Day

Access to FIRST

FIRST-Lab is open to all institutes at ETH and to external research laboratories, which require a cleanroom environment for their research work. We are an user lab focusing on the education and training of PhD students and Post Docs.

In order to work within FIRST, a project must be proposed to and approved by the FOT. Larger projects require approval by the FMT. Read more

Frequently asked questions



Next FIRST-Lab Introduction Day April 7, 2016.

Please register! Read more 


Registration already closed for seminar on March 3, 2016.

The FIRST-Lab Introduction Day is completely booked. Therefore, the registration was already closed. Read more 


FIRST-Lab will be closed on February 11-12, 2016.

FIRST-Lab will be closed for the biannual service day on Thursday and Friday, Februar 11-12, 2016. Read more 


Next FIRST-Lab Introduction Day March 3, 2016.

Please register! Read more 


Claim support hours for 4th quarter of 2015 until January 6, 2016.

The report window for claiming support hours will close on Wednesday January 6, 2016. Read more 

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