Cleanroom Facilities

Working in a cleanroom

FIRST-Lab provides with its cleanroom about 400 square meters of processing environment with controlled parameters for micro- and nanoscience experiments. Young scientists have the opportunity to work in the field of photo- and nanolithography, to carry out thin film deposition processes, to analyze and characterize their processed samples and to learn about epitaxy of semiconductors. Read more

FIRST-Lab Introduction Day

Access to FIRST

FIRST-Lab is open to all institutes at ETH and to external research laboratories, which require a cleanroom environment for their research work. We are an user lab focusing on the education and training of PhD students and Post Docs..

In order to work within FIRST, a project must be proposed to and approved by the FOT. Larger projects require approval by the FMT. Read more

Frequently asked questions



Test of Evacuation Alarm System on August 6, 2015, 9 am - 10 am.

This will be a test and no evacuation exercise. You do not have to leave the cleanroom. In case of an emergency the evacuation message will explicitely inform you. Read more 


Next FIRST-Lab Introduction Day on August 20, 2015.

Please register! Read more 


FIRST-Lab will be closed on August 13, 2015.

FIRST-Lab will be closed for the biannual service day on Thursday, August 13, 2015. Read more 


FIRST-Lab will be closed on July 7, 2015, 3 - 6 pm.

FIRST-Lab will be closed in the afternoon of Tuesday, July 7, 2015. Read more 


FIRST-Lab will be closed on July 4, 2015.

FIRST-Lab will be closed for all users on Saturday, July 4, 2015. Read more 

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