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Wafer Scribers
Other scientific service centers at ETH:
- Electron Microscopy Center (EMEZ)
- Light Microscopy Centre (LMC)
- CLA-MEMS-Cleanroom
- Binnig and Rohrer Nanotechnology Center, IBM & ETHZ
News:
22.05.2012 FIRST User Introduction Day
Lecture Announcement:
Semiconductor Materials: Characterization, Processes & Devices
Spring Semester Tuesdays, 12:45 p.m., HCI J 8
InP Scriber
- Diamond wafer scriber for III-V wafer
- Precision diamond scribe and break tool
- Sample size up to 2”
Room: HCI B125.6 Analysis
Tel: -34390
Responsible persons for user training and technical support:
(1) Emilio Gini
(2) Theodore Choi
III/V Scriber Manual, PDF, NETHZ-Login required
Si Scriber
- Diamond wafer scriber for Si wafer
- Precision diamond scribe and break tool
- Hexagonal diamond 120°
Room: HCI B129.7 SEM
Tel: -34626
Responsible persons for user training and technical support:
(2) Stefano Tirelli
(2) N.N.
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