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Optical Reflectometer
Other scientific service centers at ETH:
- Electron Microscopy Center (EMEZ)
- Light Microscopy Centre (LMC)
- CLA-MEMS-Cleanroom
- Binnig and Rohrer Nanotechnology Center, IBM & ETHZ
News:
22.05.2012 FIRST User Introduction Day
Lecture Announcement:
Semiconductor Materials: Characterization, Processes & Devices
Spring Semester Tuesdays, 12:45 p.m., HCI J 8
Filmetrics Optical Reflectometer
The Filmetrics system measures optical reflectance spectra at wavelenghts between 450 and 980nm. Using model approximations, it can calculate the estimated thickness and refractive index of semitransparent thin films on reflective substrates. Typical applications are SiNx or SiOx, photoresist or PMMA films on top of GaAs, InP or Si wafers.
The measurements give similar results as the spectroscopic ellipsometer, probably a little less accurate but acquired more easily.
Room: HCI B125.6 Analysis
Tel: -34390
Basic knowledge in optics and on the optical properties of materials are required. Otherwise, please visit the following cource: Semiconductor Materials: Characterization, Processes & Devices.
Responsible persons for user training and technical support:
Please always provide information on materials and sample structure with your request for a training.
(1) Silke Schön
(2) N.N.
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