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E-Beam Lithography
Other scientific service centers at ETH:
- Electron Microscopy Center (EMEZ)
- Light Microscopy Centre (LMC)
- CLA-MEMS-Cleanroom
- Binnig and Rohrer Nanotechnology Center, IBM & ETHZ
News:
22.05.2012 FIRST User Introduction Day
Lecture Announcement:
Semiconductor Materials: Characterization, Processes & Devices
Spring Semester Tuesdays, 12:45 p.m., HCI J 8
Projects
Visit our Pictures Gallery for some of our results.
Photonics
- InP-based photonic crystals (Communication Photonics Group)
- Microring resonators (Non-linear Optics Lab.)
Electronics
- InP-based DHBTs for high-speed digital ICs (Electronics Lab.)
- InP HEMTs for low-noise amplifiers (Teraherz Electronics Group)
Quantum Communication
- Entanglement preservation in plasmon-assisted light transmission (Communication Photonics Group)
- Quantum devices (Nanophysics)
- Semiconductor nanowires (NanoPhysics Group, Quantum Photonics Group)
- Quantum photonics (Quantum Photonics Group)
- Quantum Devices (Quantum Devices Group)
Nanotubes and Nanowires
- Electricomechanical properties of CNTs (Micro and NanoSystems)
- Mechanical properties of CNTs (IRIS)
- Mechanical properties of metallic nanowires (Nanometallurgy)
Superconducting Materials
- Superconducting Nanostructures (Uni ZH)
The Communication Photonics Group
of the Electronics Lab. hosts the development team of the
proximity-effects correction software package NanoPECS, now
commercialized by Raith GmbH.
Application notes from Raith GmbH and FIRST users
Download Application Note (Mix- and Match electron beam lithography, 0.55 MB)
Download Application Note (Proximity exposure correction, 0.55 MB)
Download Application Note (Superconducting nanostructures, 0.20 MB)
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