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List of FIRST-Equipment
On-line reservation system (Login Reqired)
Equipment Manuals Downloads (NETHZ-Login Reqired)
Equipment Responsibles List (NETHZ-Login Reqired)
Links below show technical specifications and responsible persons:
Epitaxial Crystal Growth
Deposition
- Atomic Layer Deposition (ALD)
- Electroplating of Gold
- Low Pressure Chemical Vapor Deposition (reservation)
- Plasma Enhanced Chemical Vapor Deposition (reservation)
- Physical Vapor Deposition (reservation)
- Sputter Deposition
Etching
- Inductively Coupled Plasma Etching (reservation)
- Reactive Ion Etching (reservation)
- Wetbenches for Chemical Etching
Micro- and nanolithography
- Contact Printing Mask Aligner 2" and 4"
- Deep UV Litho
- Electron-Beam Lithography System (reservation)
- Photo Resist Spinner Bench with hot plates and dry ovens
- 500 W Hg UV-Source
Characterization
- Atomic Force Microscope (reservation)
- Electrochemical C-V Profiling (reservation)
- Hall Effect Measurement (reservation)
- Optical microscopes
- Photoluminescence Mapper (reservation)
- DC on-wafer prober
- Scanning Electron Microscope (reservation)
- Spectroscopic Ellipsometer (reservation)
- Optical Reflectometer
- Dektak XT Advanced
- Tencor Stressmeter
- X-ray Diffraction System
Technology
- Micro Manipulator
- Diamond wafer scriber for III-V wafer
- Lapping/polishing system (reservation)
- Wafer Bonder
- Wafer and Ceramic Dicing Saw(reservation)
- Wire Bonder
- Rapid Thermal Anneal Oven (reservation)
- Small Anneal Oven
- O2 Plasma Asher
- Ultra Violet Ozone Cleaner (UVOCS)
- Tencor Stressmeter
Various Equipment & Services
- EDV Infrastructure & Services
- Electronics Workshop (Fausch )
- Digital Cameras (Rusterholz / Schön)
- Dead Persons Warning System (Bonetti / Schön)
- Cleanroom Particle Count Monitoring System (Gini /)
- Portable toxic Gas Monitors (Gini / N. N.)
- Mini-Fogger (Leibinger / Burkard)
- Helium Leak Tester (Rusterholz / Ebnöther)
For other, not mentioned equipment, please consult the list near the lab-entrance.
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